Semiconductor Curve Tracer CS-8000 Series

With a variety of unit combinations, it supports next-generation semiconductor measurement, and is ideal for characterization in all processes.
  • High power test at up to 5kV, up to 2,000A
  • Accurate microcurrent measurement (resolution 250fA)
  • Large 12.1-inch touchscreen
  • Various GATE signal output functions
  • Extensive temperature characteristic measurement options
  • High-power on-wafer tests with prober

General Specifications

Gate voltage:±40 V
Voltage range:0.2 ~ 5 kV
Maximum measurement current:2 kA
Current measurement resolution:250 fA

Advantages during actual measurements

  • Compatible with SiC and GaN devices
  • Supports wafers and low-power devices
  • High-power devices are also supported
  • Supports microcurrent measurement

Easy to use UI

Equipped with a 12.1-inch TFT-LCD (1280x800) high-definition and large-screen display, it can be operated with a touch screen, the function keys on the front panel, and independent knobs for each function.

① X-Y display area

Any voltage/current parameters can be set on the X-axis and Y-axis respectively, and various semiconductor characteristic curves such as Vds Id characteristics, threshold voltage, and Vds-Vgs saturation characteristics can be displayed. In addition, you can set multiple parameters on the Y-axis. Scale can be switched between Log and Linear.

② Y-T display area

The measurement applied waveform is displayed on the time axis like an oscilloscope. Since waveform abnormalities such as pulse width, measurement point, and oscillation can be checked in real time, it is easy to verify whether accurate measurements have been made. Since all applied waveform data can be saved at the same time as the data displayed in the X-Y display, the measurement results can be revalidated.

③ Measured data display area

Detailed measurement results, measurement conditions, and status are displayed in text format.

④ Configuration setting area

Sets the measurement configuration of a device. Supports the selection of voltage/current units, wiring changes, etc. in a graphical display

⑤ Parameter setting area

This area is used to set measurement parameters and measurement limits, and to switch between manual and automatic measurements.

⑥ Control panel

The front panel has buttons and rotary knobs for easy manual measurements. On the numeric keypad located in the center, you can enter numeric values for parameters. DRAIN/COLLECTOR, GATE/BASE, Manual measurement can be easily performed with vertical-axis and horizontal-axis rotary knobs.

Output sources tailored to the application

You can arbitrarily select the voltage and current units required for measurement according to the application.

The picture on the right shows,
Upper section:Test fixture
Lower section:High current unit

HV unit

This is a 2kV, 5kV high voltage unit. The DC/pulse wave can be selected. You can select constant voltage and constant current drive measurement.

Main unit CS-8200 CS-8500
Maximum voltage
(Maximum current)
2 kV
(20 mA)
5 kV
(8 mA)
Waveform DC, Pulse
Polarity Positive/negative
Measurement current resolution 250 fA

MV unit (common to all main units)

This is a medium voltage unit of 200V. You can select constant voltage and constant current drive measurement. In addition to DC and pulse, SIN, half-wave, and full-wave waveforms can be selected.

Maximum voltage
(Maximum current)
200 V(2 A)
Waveform DC(200 mA),
Pulse (2A),
SIN, Half-wave, full-wave
Polarity Positive/negative/both polarities
Measurement current resolution 250 fA

GATE unit (common to all main units)

This is a 40V unit. You can select constant voltage and constant current drive measurement. In addition to DC and pulse, SIN can be selected.

Maximum voltage (maximum current) 40 V(1 A)
Waveform DC, pulse, SIN
Polarity Positive/negative/both polarities
Measurement current resolution 250 fA

HC unit

The high-current mode supports high-current measurements up to 2,000A. Pulse width, measurement period, and measurement range can be varied

HC
Unit
CS-205 CS-210 CS-220
Maximum current
(Voltage)
500 A
(50 V)
1 kA
(50 V)
2 kA
(50 V)
Waveform Pulse
Pulse width 10µs~1ms 10µs~500µs
Polarity Positive/negative

Minimum current resolution250 fA

By adopting triaxial and optimizing the measurement system, leakage and noise in the equipment are reduced, so stable measurement of micro-currents is possible.

Various GATE signal outputs

The GATE signal can be sequenced and applied.

Hold time variable range
0.000[s] ~ 5.000[s]

Preliminary signal voltage range
Gate -40[V]~+40[V]


Hysteresis measurement

The CS-8000 has useful functions for measuring wideband gap semiconductors such as SiC and GaN with hysteresis.

The double sweep function displays the UP sweep and DOWN sweep at the same time, so hysteresis can be observed.

Safety mechanism

In addition to the interlock function, it is equipped with an output limit function.

You can set the voltage, current, and power limits to prevent damage to the DUT.
In addition, the overcurrent protection function of the hardware shuts off the current when it flows 1.4 times the measurement range.

Combination configuration

The HC unit and fixture can be selected according to the voltage and current of the measurement target.

■Configuration example When used with 2kV, 2,000A
Main unit:CS-8200
HC unit:CS-220
Test fixture:CS-8200
Accessories
 HV standard cable set CS-021
 HC standard cable set CS-022

CS-8000 Series Main Specifications

Main unit model name CS-8020 CS-8200 CS-8500
HV unit
Maximum peak voltage (maximum current) - 2 kV(20 mA) 5 kV(8 mA)
Measurement voltage range (full scale) - 2 kV ~ 50 V 5 kV ~ 50 V
Measurement current range - 20 mA ~ 50 µA 20 mA ~ 50 µA
Minimum measurement current resolution - 250 fA 250 fA
Waveform - DC pulse DC pulse
MV unit
Maximum peak voltage (maximum current) 200 V(1 A)
Measurement voltage range (full scale) 200 V ~ 200 mV
Measurement current range 2 A ~ 5 nA
Minimum measurement current resolution 250 fA
Waveform DC(200 mA), Pulse (2A), SIN, half wave, full wave
GATE unit
Maximum peak voltage (maximum current) 40 V(1 A)
Measurement voltage range (full scale) 50 V~1 V
Measurement current range 1 A~5 nA
Minimum measurement current resolution 250 fA
Waveform DC pulseSIN (50 Hz)
Standard Accessories Power cable, control interface terminator, instruction manual (booklet + CD)


HC unit model name CS-205 CS-210 CS-220
Maximum peak current (maximum voltage) 500 A(50 V) 1,000 A(50 V) 2,000 A(50 V)
Measurement voltage range (full scale) 50 V~200 mV 50 V~200 mV 50 V~200 mV
Measurement current range 500 A~5 A 1,000 A~5 A 2,000 A~5 A
Waveform Pulse
(Width 10µs to 1ms)
Pulse
(Width 10µs to 500µs)
Pulse
(Width 10µs to 500µs)
Standard Accessories Power cable, HC-FIXTURE connection unit, instruction manual

 * Separate sense cables are required when using the HC unit.



Test fixture model name CS-320MV (coming soon) CS-322HV/HC
Standard Accessories Power cable, standard lead set (CS-005 set of 7), instruction manual
- HV/HC cable (2 pcs)

 * If you wish to connect the test fixture, you will need a separate cable.


Cable set (used when connecting to the test fixture or HC unit.)

Cable set name Order number Product name

CS-020

MV standard cable set

(Recommended set for CS-320)

CS-026 7 x Triaxial cables (L = 1.0m)
CS-027 1 x Control interface cable (L = 1.0m)
CS-028 1 x Interlock/sense cable (L = 1.0m)

CS-021

HV standard cable set

(Recommended set for CS-322)

CS-025 2 x HV cables (L = 1.0m)
CS-026 7 x Triaxial cables (L = 1.0m)
CS-027 1 x Control interface cable (L = 1.0m)
CS-028 1 x Interlock/sense cable (L = 1.0m)

CS-022

HC standard cable set

(Recommended set for HC unit)

CS-027 1 x Control interface cable (L = 1.0m)
CS-028 1 x Interlock/sense cable (L = 1.0m)