High Voltage CV Measurement System CS-600A Series
High Voltage C-V Measurement System：CS-605A (5kV) / CS-603A (3kV)Ideal for measuring the capacitance of power semiconductor devices such as SiC, GaN
- Automated capacitance measurement up to 5kV (CS-605A) or 3kV (CS-603A) (with Sweep function)
- Adapters for curve tracers compatible with various device packages can be used as is
- Supports systematization with probe stations for capacitance measurement on wafers and chips
- Capacitance measurement of capacitors for high voltage is also possible
* LCR meter is required separately.
Examples of measurement by CV Measurement Tool (PC software)
[Measurement example 1] Sweep measurement up to 2.5kV
[Measurement example 2] High resolution measurement up to 70V
Measurement block diagram
Specifications
| Item | CS-605A | CS-603A |
|---|---|---|
| DC bias | 0-5kV / 0-50V | 0-3kV / 0-50V |
| Setting resolution | 100mV / 1mV | |
| Measurement range | 10kHz 100pF～10nF ±5％(±50pF) 100kHz 10pF～1nF ±5％(±2pF) When Cgd：Cds：Cgs = 1：1：1, Cgd：Cds：Cgs = 1：10：100 |
|
| Frequency range | 10kHz～100kHz | |
| LCR meter measurement signal level range |
100mV～1V | |
| Parameter for measurement | Cies, Ciss (input capacitance), Coes, Coss (output capacitance), Cres, Crss (reverse transmission capacitance), CT (capacitance between terminals), Cgs, Cge/Cgd, Ccg/Cds, Cce (calculated value), Rg (gate resistance) |
|
| Measurement mode | C-V：Capacitance vs. bias voltage, C-G：Capacitance vs. gate voltage, C-Time：Capacitance vs. time | |
| Gate bias | +/-25V at 1mV/step | |
| Type | Linear/Log/List/Single | |
| Sweep direction | UP Sweep | |
| Measurement point | 5,000 points | |
| Other | Waveform comparison, REF display, with interlock function, external interlock (option) | |
| External dimensions / weight | Approx. 330W × 370D × 230H (mm) * Excluding protrusions / Approx. 8.5kg | |
| Operating temperature range | 0℃～+40℃ | |
| Performance warranty temperature range | 23℃±5℃ | |
| Operating humidity range | 0～+40℃, 5%～80% RH (30°C, no condensation) Upper limit value 55% RH (40°C, no condensation) |
|
| Power supply input range | AC 100-240 V 50/60Hz | |
| Power consumption | 35VA | |
